Kev lag luam semiconductor xav tau kev huv huv heev, kev tiv thaiv corrosion, thiab kev ruaj ntseg los ntawm cov khoom siv, thiab cov khoom siv ceramic zoo kawg nkaus ua tau raws li cov kev cai no, ua rau lawv yog ib qho tseem ceeb ntawm cov khoom siv semiconductor.
Thaum lub sij hawm wafer manufacturing, ib puag ncig ntawm cov khoom siv feem ntau raug rau qhov kub thiab txias, lub tshuab nqus tsev siab, thiab muaj zog corrosion. Cov khoom siv hlau tsoos tau yooj yim corroded los yog tso tawm impurities, thaum cov khoom siv ceramic muaj cov tshuaj lom neeg ruaj khov thiab cov yam ntxwv qis qis, ua kom muaj kev ruaj ntseg zoo.
Cov khoom siv semiconductor ceramic feem ntau suav nrog ceramic chucks, ceramic heaters, insulating rings, nozzles, thiab cov khoom qhia. Ntawm cov no, electrostatic chucks siv cov khoom zoo heev insulating ntawm cov ntaub ntawv ceramic los kho wafers thiab yog ib qho tseem ceeb ntawm cov khoom siv semiconductor.
Raws li cov txheej txheem tsim cov chips txuas ntxiv mus rau qib siab dua, cov kev xav tau ntawm cov cuab yeej siv tau nce zuj zus. Cov ntaub ntawv zoo tshaj plaws ceramic, nrog rau lawv qhov kev ruaj khov thiab ua haujlwm rau cov ntshav plasma corrosion, yuav ua lub luag haujlwm tseem ceeb dua hauv kev lag luam semiconductor yav tom ntej.